{"id":1770,"date":"2026-04-09T09:29:33","date_gmt":"2026-04-09T09:29:33","guid":{"rendered":"https:\/\/www.vacuum-sintering.com\/?post_type=product&#038;p=1770"},"modified":"2026-09-19T08:04:48","modified_gmt":"2026-09-19T08:04:48","slug":"c%e7%b3%bb%e5%88%97cvd-cvi%e7%b3%bb%e7%bb%9f","status":"publish","type":"product","link":"https:\/\/www.vacuum-sintering.com\/zh\/product\/c-series-cvd-cvi-system\/","title":{"rendered":"C\u7cfb\u5217CVD\/CVI\u7cfb\u7edf"},"content":{"rendered":"<p><!-- HAOYUE_SEO_TECHNICAL_OVERVIEW_START --><\/p>\n<h2>C\u7cfb\u5217CVD\/CVI\u7cfb\u7edf\u6280\u672f\u6982\u8ff0<\/h2>\n<p><strong>C\u7cfb\u5217CVD\/CVI\u7cfb\u7edf<\/strong> \u662fHAOYUE c\u7cfb\u5217CVD\/CVI\u7cfb\u7edf\u89e3\u51b3\u65b9\u6848\uff0c\u4e13\u4e3aCVD\/CVI\u5de5\u827a\u800c\u8bbe\u8ba1\u3002\u5b83\u9002\u7528\u4e8e\u5bf9\u6e29\u5ea6\u3001\u771f\u7a7a\u3001\u538b\u529b\u3001\u6c14\u6c1b\u63a7\u5236\u7a33\u5b9a\u6027\u548c\u5de5\u827a\u91cd\u590d\u6027\u8981\u6c42\u6781\u9ad8\u7684\u7814\u7a76\u3001\u4e2d\u8bd5\u548c\u5de5\u4e1a\u751f\u4ea7\u3002.<\/p>\n<h3>C\u7cfb\u5217CVD\/CVI\u7cfb\u7edf\u5e94\u7528<\/h3>\n<ul>\n<li>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u548c\u6e17\u900f<\/li>\n<li>\u78b3\u78b3\u590d\u5408\u6750\u6599\u548c\u9676\u74f7\u57fa\u590d\u5408\u6750\u6599\u52a0\u5de5<\/li>\n<li>\u53d7\u63a7\u6c14\u4f53\u6d41\u91cf\u3001\u771f\u7a7a\u548c\u57fa\u4e8e\u914d\u65b9\u7684\u6d82\u5c42\u5de5\u4f5c<\/li>\n<\/ul>\n<h3>C\u7cfb\u5217CVD\/CVI\u7cfb\u7edf\u914d\u7f6e\u9009\u9879<\/h3>\n<ul>\n<li>\u8154\u5ba4\u5c3a\u5bf8\u3001\u53ef\u7528\u70ed\u533a\u3001\u88c5\u8f7d\u65b9\u5f0f\u548c\u5939\u5177\u8bbe\u8ba1<\/li>\n<li>\u5de5\u4f5c\u6e29\u5ea6\u3001\u771f\u7a7a\u5ea6\u3001\u538b\u529b\u3001\u6c14\u6c1b\u548c\u51b7\u5374\u65b9\u5f0f<\/li>\n<li>\u77f3\u58a8\u3001\u94bc\u3001\u94a8\u6216\u5b9a\u5236\u70ed\u533a\u914d\u7f6e<\/li>\n<li>PLC\u63a7\u5236\u3001\u914d\u65b9\u7ba1\u7406\u3001\u6570\u636e\u8bb0\u5f55\u548c\u5b89\u5168\u8054\u9501\u9009\u9879<\/li>\n<\/ul>\n<h3>\u76f8\u5173\u8c6a\u5cb3\u7089\u7cfb\u7edf<\/h3>\n<ul>\n<li><a href=\"\/zh\/product\/p7h%e7%9c%9f%e7%a9%ba%e7%83%ad%e5%8e%8b%e7%82%89\/\">P7H\u771f\u7a7a\u70ed\u538b\u7089<\/a><\/li>\n<li><a href=\"\/zh\/product\/p7v%e7%9c%9f%e7%a9%ba%e7%83%ad%e5%8e%8b%e7%82%89\/\">P7V\u771f\u7a7a\u70ed\u538b\u7089<\/a><\/li>\n<li><a href=\"\/zh\/product\/p7v%e5%8f%8c%e5%ae%a4%e7%9c%9f%e7%a9%ba%e7%83%ad%e5%8e%8b%e7%82%89\/\">P7V\u578b\u53cc\u5ba4\u771f\u7a7a\u70ed\u538b\u7089<\/a><\/li>\n<\/ul>\n<p>\u8bf7\u63d0\u4f9b\u6750\u6599\u7c7b\u578b\u3001\u96f6\u4ef6\u5c3a\u5bf8\u3001\u76ee\u6807\u6e29\u5ea6\u3001\u538b\u529b\u6216\u6c14\u6c1b\u8981\u6c42\u4ee5\u53ca\u751f\u4ea7\u80fd\u529b\u3002. <a href=\"\/zh\/%e8%81%94%e7%b3%bb%e6%88%91%e4%bb%ac\/\">\u8054\u7cfb\u8c6a\u5cb3\u5de5\u7a0b\u5e08<\/a> \u8bf7\u6c42\u63d0\u4f9b C \u7cfb\u5217 CVD\/CVI \u7cfb\u7edf\u7684\u6280\u672f\u65b9\u6848\u3002.<\/p>\n<p><!-- HAOYUE_SEO_TECHNICAL_OVERVIEW_END --><\/p>\n<h2 data-section-id=\"18cy1dm\" data-start=\"342\" data-end=\"364\">\ud83e\udde9 \u4ea7\u54c1\u6982\u8ff0<\/h2>\n<p data-start=\"366\" data-end=\"552\"><strong data-start=\"366\" data-end=\"552\">C\u7cfb\u5217CVD\/CVI\u7cfb\u7edf\u662f\u4e00\u6b3e\u5148\u8fdb\u7684\u70ed\u5904\u7406\u7cfb\u7edf\uff0c\u4e13\u4e3a\u9ad8\u6027\u80fd\u6750\u6599\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u548c\u5316\u5b66\u6c14\u76f8\u6e17\u900f\uff08CVI\uff09\u800c\u8bbe\u8ba1\u3002.<\/strong><\/p>\n<p data-start=\"554\" data-end=\"574\">\u8be5\u7cfb\u7edf\u80fd\u591f\u5b9e\u73b0\uff1a<\/p>\n<ul data-start=\"576\" data-end=\"648\">\n<li data-section-id=\"6asno\" data-start=\"576\" data-end=\"603\"><strong data-start=\"578\" data-end=\"603\">\u8868\u9762\u6d82\u5c42\uff08CVD\uff09<\/strong><\/li>\n<li data-section-id=\"1lzuwub\" data-start=\"604\" data-end=\"648\"><strong data-start=\"606\" data-end=\"648\">\u5185\u90e8\u7ed3\u6784\u81f4\u5bc6\u5316\uff08CVI\uff09<\/strong><\/li>\n<\/ul>\n<p data-start=\"650\" data-end=\"669\">\ud83d\udc49 \u5e7f\u6cdb\u7528\u4e8e\uff1a<\/p>\n<ul data-start=\"671\" data-end=\"748\">\n<li data-section-id=\"p6tvi3\" data-start=\"671\" data-end=\"698\">\u534a\u5bfc\u4f53\u6750\u6599<\/li>\n<li data-section-id=\"azlpw7\" data-start=\"699\" data-end=\"720\">\u5148\u8fdb\u9676\u74f7<\/li>\n<li data-section-id=\"10oeif5\" data-start=\"721\" data-end=\"748\">\u78b3\u57fa\u590d\u5408\u6750\u6599<\/li>\n<\/ul>\n<p data-start=\"750\" data-end=\"948\">CVD\u6280\u672f\u80fd\u591f <strong data-start=\"773\" data-end=\"806\">\u9ad8\u7eaf\u5ea6\u6d82\u5c42\u5f62\u6210<\/strong>, \u800c CVI \u5141\u8bb8 <strong data-start=\"825\" data-end=\"908\">\u6c14\u76f8\u6e17\u5165\u591a\u5b54\u7ed3\u6784\u5f62\u6210\u81f4\u5bc6\u590d\u5408\u6750\u6599<\/strong><\/p>\n<hr data-start=\"950\" data-end=\"953\" \/>\n<h2 data-section-id=\"1csvuas\" data-start=\"955\" data-end=\"1003\">\ud83d\udd2c CVD \u4e0e CVI\uff08\u6838\u5fc3\u6280\u672f\u7406\u89e3\uff09<\/h2>\n<h3 data-section-id=\"104ks4k\" data-start=\"1005\" data-end=\"1042\">\u2714 \u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)<\/h3>\n<ul data-start=\"1043\" data-end=\"1195\">\n<li data-section-id=\"okl04h\" data-start=\"1043\" data-end=\"1087\">\u5728\u6750\u6599\u8868\u9762\u6c89\u79ef\u8584\u819c<\/li>\n<li data-section-id=\"1b4njol\" data-start=\"1088\" data-end=\"1195\">\u6d82\u5c42\u539a\u5ea6\uff1a\n<ul data-start=\"1111\" data-end=\"1195\">\n<li data-section-id=\"28yg0n\" data-start=\"1111\" data-end=\"1195\">\u4ece <strong data-start=\"1118\" data-end=\"1155\">\u7eb3\u7c73\u7ea7\u5230\u6570\u767e\u5fae\u7c73<\/strong><\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p data-start=\"1197\" data-end=\"1218\">\ud83d\udc49 \u5e38\u7528\u6750\u6599\uff1a<\/p>\n<ul data-start=\"1219\" data-end=\"1283\">\n<li data-section-id=\"3ude47\" data-start=\"1219\" data-end=\"1244\">\u78b3\u5316\u7845\uff08SiC\uff09<\/li>\n<li data-section-id=\"1op6k2s\" data-start=\"1245\" data-end=\"1265\">\u70ed\u89e3\u78b3<\/li>\n<li data-section-id=\"gacevz\" data-start=\"1266\" data-end=\"1283\">\u6c2e\u5316\u787c<\/li>\n<\/ul>\n<hr 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data-end=\"4121\">\u5148\u8fdb\u9676\u74f7\u5236\u9020<\/li>\n<li data-section-id=\"fjih71\" data-start=\"4122\" data-end=\"4153\">\u78b3\u590d\u5408\u6750\u6599\u751f\u4ea7<\/li>\n<\/ul>\n<p data-start=\"4155\" data-end=\"4182\">\ud83d\udc49 \u7279\u522b\u9002\u7528\u4e8e\uff1a<\/p>\n<ul data-start=\"4184\" data-end=\"4261\">\n<li data-section-id=\"puvy2w\" data-start=\"4184\" data-end=\"4199\">SiC\u6d82\u5c42<\/li>\n<li data-section-id=\"11az82q\" data-start=\"4200\" data-end=\"4218\">\u78b3\u6d82\u5c42<\/li>\n<li data-section-id=\"1k6thwd\" data-start=\"4219\" data-end=\"4233\">BN\u6d82\u5c42<\/li>\n<li data-section-id=\"1euozzt\" data-start=\"4234\" data-end=\"4261\">\u590d\u5408\u81f4\u5bc6\u5316<\/li>\n<\/ul>\n<hr data-start=\"4263\" data-end=\"4266\" \/>\n<h2 data-section-id=\"wrrsz\" data-start=\"4268\" data-end=\"4309\">\ud83d\ude80 \u4e3a\u4ec0\u4e48\u9009\u62e9 C \u7cfb\u5217 CVD\/CVI \u7cfb\u7edf\uff1f<\/h2>\n<h3 data-section-id=\"latd11\" data-start=\"4311\" 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data-start=\"4665\" data-end=\"4676\" data-col-size=\"sm\">V\u7cfb\u5217<\/td>\n<td data-start=\"4676\" data-end=\"4701\" data-col-size=\"sm\">\u771f\u7a7a\u70ed\u5904\u7406<\/td>\n<\/tr>\n<tr data-start=\"4702\" data-end=\"4739\">\n<td data-start=\"4702\" data-end=\"4713\" data-col-size=\"sm\">P\u7cfb\u5217<\/td>\n<td data-start=\"4713\" data-end=\"4739\" data-col-size=\"sm\">\u70ed\u538b\u70e7\u7ed3<\/td>\n<\/tr>\n<tr data-start=\"4740\" data-end=\"4768\">\n<td data-start=\"4740\" data-end=\"4751\" data-col-size=\"sm\">S\u7cfb\u5217<\/td>\n<td data-start=\"4751\" data-end=\"4768\" data-col-size=\"sm\">SPS\u70e7\u7ed3<\/td>\n<\/tr>\n<tr data-start=\"4769\" data-end=\"4842\">\n<td data-start=\"4769\" data-end=\"4799\" data-col-size=\"sm\"><strong data-start=\"4771\" data-end=\"4798\">C\u7cfb\u5217\uff08\u672c\u4ea7\u54c1\uff09<\/strong><\/td>\n<td data-start=\"4799\" data-end=\"4842\" data-col-size=\"sm\"><strong data-start=\"4801\" 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data-start=\"5014\" data-end=\"5044\">\u8154\u5ba4\u5c3a\u5bf8\u5b9a\u5236<\/li>\n<li data-section-id=\"zglimg\" data-start=\"5045\" data-end=\"5073\">\u71c3\u6c14\u7cfb\u7edf\u914d\u7f6e<\/li>\n<li data-section-id=\"12l6zp0\" data-start=\"5074\" data-end=\"5101\">\u8fc7\u7a0b\u63a7\u5236\u5347\u7ea7<\/li>\n<li data-section-id=\"h15fzz\" data-start=\"5102\" data-end=\"5138\">\u5c3e\u6c14\u5904\u7406\u7cfb\u7edf\u5347\u7ea7<\/li>\n<\/ul>\n<hr data-start=\"5140\" data-end=\"5143\" \/>\n<h2 data-section-id=\"fzuotw\" data-start=\"5145\" data-end=\"5165\">\ud83c\udfaf \u4e3a\u4ec0\u4e48\u9009\u62e9\u6211\u4eec\uff1f<\/h2>\n<ul data-start=\"5167\" data-end=\"5369\">\n<li data-section-id=\"uxa53n\" data-start=\"5167\" data-end=\"5211\">\u4e13\u4e1aCVD\/CVI\u7cfb\u7edf\u5236\u9020\u5546<\/li>\n<li data-section-id=\"i1gfn\" data-start=\"5212\" data-end=\"5264\">\u5728\u5148\u8fdb\u6750\u6599\u52a0\u5de5\u65b9\u9762\u62e5\u6709\u5f3a\u5927\u7684\u4e13\u4e1a\u77e5\u8bc6<\/li>\n<li 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Semiconductor Materials"],"_bw_backup_description":["<h2 data-section-id=\"18cy1dm\" data-start=\"342\" data-end=\"364\">\ud83e\udde9 Product Overview<\/h2>\r\n<p data-start=\"366\" data-end=\"552\"><strong data-start=\"366\" data-end=\"552\">The C Series CVD\/CVI System is an advanced thermal processing system designed for chemical vapor deposition (CVD) and chemical vapor infiltration (CVI) of high-performance materials.<\/strong><\/p>\r\n<p data-start=\"554\" data-end=\"574\">This system enables:<\/p>\r\n\r\n<ul data-start=\"576\" data-end=\"648\">\r\n \t<li data-section-id=\"6asno\" data-start=\"576\" data-end=\"603\"><strong data-start=\"578\" data-end=\"603\">Surface coating (CVD)<\/strong><\/li>\r\n \t<li data-section-id=\"1lzuwub\" data-start=\"604\" data-end=\"648\"><strong data-start=\"606\" data-end=\"648\">Internal structure densification (CVI)<\/strong><\/li>\r\n<\/ul>\r\n<p data-start=\"650\" data-end=\"669\">\ud83d\udc49 Widely used for:<\/p>\r\n\r\n<ul data-start=\"671\" data-end=\"748\">\r\n \t<li data-section-id=\"p6tvi3\" data-start=\"671\" data-end=\"698\">Semiconductor materials<\/li>\r\n \t<li data-section-id=\"azlpw7\" data-start=\"699\" data-end=\"720\">Advanced ceramics<\/li>\r\n \t<li data-section-id=\"10oeif5\" data-start=\"721\" data-end=\"748\">Carbon-based composites<\/li>\r\n<\/ul>\r\n<p data-start=\"750\" data-end=\"948\">CVD technology enables <strong data-start=\"773\" data-end=\"806\">high-purity coating formation<\/strong>, while CVI allows <strong data-start=\"825\" data-end=\"908\">gas-phase infiltration into porous structures to form dense composite materials<\/strong><\/p>\r\n\r\n\r\n<hr data-start=\"950\" data-end=\"953\" \/>\r\n\r\n<h2 data-section-id=\"1csvuas\" data-start=\"955\" data-end=\"1003\">\ud83d\udd2c CVD vs CVI (Core Technology Understanding)<\/h2>\r\n<h3 data-section-id=\"104ks4k\" data-start=\"1005\" data-end=\"1042\">\u2714 Chemical Vapor Deposition (CVD)<\/h3>\r\n<ul data-start=\"1043\" data-end=\"1195\">\r\n \t<li data-section-id=\"okl04h\" data-start=\"1043\" data-end=\"1087\">Deposits thin films on material surfaces<\/li>\r\n \t<li data-section-id=\"1b4njol\" data-start=\"1088\" data-end=\"1195\">Coating thickness:\r\n<ul data-start=\"1111\" data-end=\"1195\">\r\n \t<li data-section-id=\"28yg0n\" data-start=\"1111\" data-end=\"1195\">From <strong data-start=\"1118\" data-end=\"1155\">nanometers to hundreds of microns<\/strong><\/li>\r\n<\/ul>\r\n<\/li>\r\n<\/ul>\r\n<p data-start=\"1197\" data-end=\"1218\">\ud83d\udc49 Typical materials:<\/p>\r\n\r\n<ul data-start=\"1219\" data-end=\"1283\">\r\n \t<li data-section-id=\"3ude47\" data-start=\"1219\" data-end=\"1244\">Silicon carbide (SiC)<\/li>\r\n \t<li data-section-id=\"1op6k2s\" data-start=\"1245\" data-end=\"1265\">Pyrolytic carbon<\/li>\r\n \t<li data-section-id=\"gacevz\" data-start=\"1266\" data-end=\"1283\">Boron nitride<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"1285\" data-end=\"1288\" \/>\r\n\r\n<h3 data-section-id=\"1c9z5se\" data-start=\"1290\" data-end=\"1329\">\u2714 Chemical Vapor Infiltration (CVI)<\/h3>\r\n<ul data-start=\"1330\" data-end=\"1398\">\r\n \t<li data-section-id=\"jji4e2\" data-start=\"1330\" data-end=\"1365\">Gas penetrates porous materials<\/li>\r\n \t<li data-section-id=\"cv4kcy\" data-start=\"1366\" data-end=\"1398\">Deposits material internally<\/li>\r\n<\/ul>\r\n<p data-start=\"1400\" data-end=\"1410\">\ud83d\udc49 Result:<\/p>\r\n\r\n<ul data-start=\"1411\" data-end=\"1536\">\r\n \t<li data-section-id=\"ubv6u0\" data-start=\"1411\" data-end=\"1443\">Improved mechanical strength<\/li>\r\n \t<li data-section-id=\"4mxwfx\" data-start=\"1444\" data-end=\"1472\">Enhanced heat resistance<\/li>\r\n \t<li data-section-id=\"pm3guv\" data-start=\"1473\" data-end=\"1536\">Lower residual stress<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"1538\" data-end=\"1541\" \/>\r\n\r\n<h2 data-section-id=\"1ufn8w1\" data-start=\"1543\" data-end=\"1566\">\u2699\ufe0f Core Applications<\/h2>\r\n<p data-start=\"1568\" data-end=\"1606\">This CVD\/CVI system is widely used in:<\/p>\r\n\r\n<ul data-start=\"1608\" data-end=\"1745\">\r\n \t<li data-section-id=\"hxadpn\" data-start=\"1608\" data-end=\"1645\"><strong data-start=\"1610\" data-end=\"1645\">Ceramic matrix composites (CMC)<\/strong><\/li>\r\n \t<li data-section-id=\"6oqz8j\" data-start=\"1646\" data-end=\"1674\">Carbon-carbon composites<\/li>\r\n \t<li data-section-id=\"cdkrn5\" data-start=\"1675\" data-end=\"1703\">Semiconductor substrates<\/li>\r\n \t<li data-section-id=\"1ffd69u\" data-start=\"1704\" data-end=\"1745\">High-temperature structural materials<\/li>\r\n<\/ul>\r\n<p data-start=\"1747\" data-end=\"1771\">\ud83d\udc49 Typical applications:<\/p>\r\n\r\n<ul data-start=\"1773\" data-end=\"1916\">\r\n \t<li data-section-id=\"14nzl54\" data-start=\"1773\" data-end=\"1803\">Epitaxial wafer substrates<\/li>\r\n \t<li data-section-id=\"16odzrp\" data-start=\"1804\" data-end=\"1831\">Semiconductor crucibles<\/li>\r\n \t<li data-section-id=\"1d1i4b3\" data-start=\"1832\" data-end=\"1853\">Hot bending molds<\/li>\r\n \t<li data-section-id=\"uywwj8\" data-start=\"1854\" data-end=\"1916\">Aerospace components<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"1918\" data-end=\"1921\" \/>\r\n\r\n<h2 data-section-id=\"1maelq3\" data-start=\"1923\" data-end=\"1953\">\u2b50 Key Features &amp; Advantages<\/h2>\r\n<h3 data-section-id=\"792aoj\" data-start=\"1955\" data-end=\"1985\">\u2714 High Equipment Stability<\/h3>\r\n<ul data-start=\"1986\" data-end=\"2104\">\r\n \t<li data-section-id=\"xyut9t\" data-start=\"1986\" data-end=\"2033\">Designed for long-term continuous operation<\/li>\r\n \t<li data-section-id=\"9q4j4g\" data-start=\"2034\" data-end=\"2104\">Low maintenance requirements<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"2106\" data-end=\"2109\" \/>\r\n\r\n<h3 data-section-id=\"1kzfavu\" data-start=\"2111\" data-end=\"2149\">\u2714 Excellent Temperature Uniformity<\/h3>\r\n<ul data-start=\"2150\" data-end=\"2278\">\r\n \t<li data-section-id=\"hej2nd\" data-start=\"2150\" data-end=\"2186\">Temperature uniformity: <strong data-start=\"2176\" data-end=\"2184\">\u00b15\u00b0C<\/strong><\/li>\r\n \t<li data-section-id=\"yh1whs\" data-start=\"2187\" data-end=\"2278\">Multi-channel gas flow ensures uniform deposition<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"2280\" data-end=\"2283\" \/>\r\n\r\n<h3 data-section-id=\"natia5\" data-start=\"2285\" data-end=\"2320\">\u2714 High Process Control Accuracy<\/h3>\r\n<ul data-start=\"2321\" data-end=\"2401\">\r\n \t<li data-section-id=\"vtnjm7\" data-start=\"2321\" data-end=\"2401\">Precise control of:\r\n<ul data-start=\"2345\" data-end=\"2401\">\r\n \t<li data-section-id=\"y98fxr\" data-start=\"2345\" data-end=\"2357\">Gas flow<\/li>\r\n \t<li data-section-id=\"113o6h9\" data-start=\"2360\" data-end=\"2372\">Pressure<\/li>\r\n \t<li data-section-id=\"f6cwf9\" data-start=\"2375\" data-end=\"2401\">Deposition environment<\/li>\r\n<\/ul>\r\n<\/li>\r\n<\/ul>\r\n<p data-start=\"2403\" data-end=\"2438\">\ud83d\udc49 Ensures stable coating quality<\/p>\r\n\r\n\r\n<hr data-start=\"2440\" data-end=\"2443\" \/>\r\n\r\n<h3 data-section-id=\"1a41np5\" data-start=\"2445\" data-end=\"2475\">\u2714 Advanced Gas Flow Design<\/h3>\r\n<ul data-start=\"2476\" data-end=\"2544\">\r\n \t<li data-section-id=\"1pkytp3\" data-start=\"2476\" data-end=\"2502\">Multi-channel gas path<\/li>\r\n \t<li data-section-id=\"1hjnxsp\" data-start=\"2503\" data-end=\"2544\">Uniform flow field without dead zones<\/li>\r\n<\/ul>\r\n<p data-start=\"2546\" data-end=\"2626\">\ud83d\udc49 Ensures consistent deposition results<\/p>\r\n\r\n\r\n<hr data-start=\"2628\" data-end=\"2631\" \/>\r\n\r\n<h3 data-section-id=\"1jxixvv\" data-start=\"2633\" data-end=\"2672\">\u2714 Fully Enclosed Deposition Chamber<\/h3>\r\n<ul data-start=\"2673\" data-end=\"2733\">\r\n \t<li data-section-id=\"hdfgc8\" data-start=\"2673\" data-end=\"2703\">Strong sealing performance<\/li>\r\n \t<li data-section-id=\"1xk9gdh\" data-start=\"2704\" data-end=\"2733\">Anti-contamination design<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"2735\" data-end=\"2738\" \/>\r\n\r\n<h3 data-section-id=\"1yk88wo\" data-start=\"2740\" data-end=\"2769\">\u2714 High Safety Performance<\/h3>\r\n<ul data-start=\"2770\" data-end=\"2882\">\r\n \t<li data-section-id=\"cwiqh0\" data-start=\"2770\" data-end=\"2804\">PLC + HMI + PID control system<\/li>\r\n \t<li data-section-id=\"1eg4dqj\" data-start=\"2805\" data-end=\"2882\">Pressure sensing and safety control<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"2884\" data-end=\"2887\" \/>\r\n\r\n<h3 data-section-id=\"1dlzvpc\" data-start=\"2889\" data-end=\"2923\">\u2714 Exhaust Gas Treatment System<\/h3>\r\n<ul data-start=\"2924\" data-end=\"3023\">\r\n \t<li data-section-id=\"10zpzzm\" data-start=\"2924\" data-end=\"3023\">Multi-stage treatment for:\r\n<ul data-start=\"2955\" data-end=\"3023\">\r\n \t<li data-section-id=\"1v90ujl\" data-start=\"2955\" data-end=\"2974\">Corrosive gases<\/li>\r\n \t<li data-section-id=\"163euju\" data-start=\"2977\" data-end=\"2996\">Flammable gases<\/li>\r\n \t<li data-section-id=\"1opoyqj\" data-start=\"2999\" data-end=\"3023\">Dust and by-products<\/li>\r\n<\/ul>\r\n<\/li>\r\n<\/ul>\r\n<p data-start=\"3025\" data-end=\"3101\">\ud83d\udc49 Environmentally friendly and safe<\/p>\r\n\r\n\r\n<hr data-start=\"3103\" data-end=\"3106\" \/>\r\n\r\n<h3 data-section-id=\"1943mve\" data-start=\"3108\" data-end=\"3147\">\u2714 Corrosion-Resistant Vacuum System<\/h3>\r\n<ul data-start=\"3148\" data-end=\"3253\">\r\n \t<li data-section-id=\"1aheol7\" data-start=\"3148\" data-end=\"3180\">Long continuous working time<\/li>\r\n \t<li data-section-id=\"1ym1s1p\" data-start=\"3181\" data-end=\"3253\">Extremely low maintenance rate<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"3255\" data-end=\"3258\" \/>\r\n\r\n<h3 data-section-id=\"yeiwh3\" data-start=\"3260\" data-end=\"3291\">\u2714 Vertical Structure Design<\/h3>\r\n<ul data-start=\"3292\" data-end=\"3409\">\r\n \t<li data-section-id=\"pxzf5u\" data-start=\"3292\" data-end=\"3324\">Top\/bottom opening structure<\/li>\r\n \t<li data-section-id=\"yiabq5\" data-start=\"3325\" data-end=\"3350\">High loading accuracy<\/li>\r\n \t<li data-section-id=\"10fgi32\" data-start=\"3351\" data-end=\"3409\">Easy operation<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"3411\" data-end=\"3414\" \/>\r\n\r\n<h2 data-section-id=\"q6dpmj\" data-start=\"3416\" data-end=\"3479\">\ud83d\udcca Technical Specifications (Strictly Based on Product Data)<\/h2>\r\n<h3 data-section-id=\"1b3fy68\" data-start=\"3481\" data-end=\"3499\">Typical Models<\/h3>\r\n<div class=\"TyagGW_tableContainer\">\r\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\r\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3501\" data-end=\"3866\">\r\n<thead data-start=\"3501\" data-end=\"3575\">\r\n<tr data-start=\"3501\" data-end=\"3575\">\r\n<th class=\"\" data-start=\"3501\" data-end=\"3509\" data-col-size=\"sm\">Model<\/th>\r\n<th class=\"\" data-start=\"3509\" data-end=\"3524\" data-col-size=\"sm\">Chamber Size<\/th>\r\n<th class=\"\" data-start=\"3524\" data-end=\"3542\" data-col-size=\"sm\">Ultimate Vacuum<\/th>\r\n<th class=\"\" data-start=\"3542\" data-end=\"3560\" data-col-size=\"sm\">Max Temperature<\/th>\r\n<th class=\"\" data-start=\"3560\" data-end=\"3575\" data-col-size=\"sm\">Application<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody data-start=\"3647\" data-end=\"3866\">\r\n<tr data-start=\"3647\" data-end=\"3700\">\r\n<td data-start=\"3647\" data-end=\"3657\" data-col-size=\"sm\">C4VGR16<\/td>\r\n<td data-start=\"3657\" data-end=\"3673\" data-col-size=\"sm\">\u03a6500 \u00d7 600 mm<\/td>\r\n<td data-start=\"3673\" data-end=\"3680\" data-col-size=\"sm\">1 Pa<\/td>\r\n<td data-start=\"3680\" data-end=\"3689\" data-col-size=\"sm\">1600\u00b0C<\/td>\r\n<td data-start=\"3689\" data-end=\"3700\" data-col-size=\"sm\">CVD\/CVI<\/td>\r\n<\/tr>\r\n<tr data-start=\"3701\" data-end=\"3754\">\r\n<td data-start=\"3701\" data-end=\"3711\" data-col-size=\"sm\">C6VGR16<\/td>\r\n<td data-start=\"3711\" data-end=\"3727\" data-col-size=\"sm\">\u03a6800 \u00d7 900 mm<\/td>\r\n<td data-start=\"3727\" data-end=\"3734\" data-col-size=\"sm\">1 Pa<\/td>\r\n<td data-col-size=\"sm\" data-start=\"3734\" data-end=\"3743\">1600\u00b0C<\/td>\r\n<td data-col-size=\"sm\" data-start=\"3743\" data-end=\"3754\">CVD\/CVI<\/td>\r\n<\/tr>\r\n<tr data-start=\"3755\" data-end=\"3810\">\r\n<td data-start=\"3755\" data-end=\"3765\" data-col-size=\"sm\">C7VGR16<\/td>\r\n<td data-start=\"3765\" data-end=\"3783\" data-col-size=\"sm\">\u03a61000 \u00d7 1000 mm<\/td>\r\n<td data-start=\"3783\" data-end=\"3790\" data-col-size=\"sm\">1 Pa<\/td>\r\n<td data-start=\"3790\" data-end=\"3799\" data-col-size=\"sm\">1600\u00b0C<\/td>\r\n<td data-start=\"3799\" data-end=\"3810\" data-col-size=\"sm\">CVD\/CVI<\/td>\r\n<\/tr>\r\n<tr data-start=\"3811\" data-end=\"3866\">\r\n<td data-start=\"3811\" data-end=\"3821\" data-col-size=\"sm\">C8VGR16<\/td>\r\n<td data-start=\"3821\" data-end=\"3839\" data-col-size=\"sm\">\u03a61100 \u00d7 1200 mm<\/td>\r\n<td data-start=\"3839\" data-end=\"3846\" data-col-size=\"sm\">1 Pa<\/td>\r\n<td data-start=\"3846\" data-end=\"3855\" data-col-size=\"sm\">1600\u00b0C<\/td>\r\n<td data-start=\"3855\" data-end=\"3866\" data-col-size=\"sm\">CVD\/CVI<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<\/div>\r\n<p data-start=\"3868\" data-end=\"3975\">\ud83d\udccc All specifications strictly aligned with official product data<\/p>\r\n\r\n\r\n<hr data-start=\"3977\" data-end=\"3980\" \/>\r\n\r\n<h2 data-section-id=\"1buml6n\" data-start=\"3982\" data-end=\"4006\">\ud83c\udfed Application Fields<\/h2>\r\n<p data-start=\"4008\" data-end=\"4033\">This system is ideal for:<\/p>\r\n\r\n<ul data-start=\"4035\" data-end=\"4153\">\r\n \t<li data-section-id=\"2sy595\" data-start=\"4035\" data-end=\"4061\">Semiconductor industry<\/li>\r\n \t<li data-section-id=\"1df44kt\" data-start=\"4062\" data-end=\"4085\">Aerospace materials<\/li>\r\n \t<li data-section-id=\"1pqh7jr\" data-start=\"4086\" data-end=\"4121\">Advanced ceramics manufacturing<\/li>\r\n \t<li data-section-id=\"fjih71\" data-start=\"4122\" data-end=\"4153\">Carbon composite production<\/li>\r\n<\/ul>\r\n<p data-start=\"4155\" data-end=\"4182\">\ud83d\udc49 Especially suitable for:<\/p>\r\n\r\n<ul data-start=\"4184\" data-end=\"4261\">\r\n \t<li data-section-id=\"puvy2w\" data-start=\"4184\" data-end=\"4199\">SiC coating<\/li>\r\n \t<li data-section-id=\"11az82q\" data-start=\"4200\" data-end=\"4218\">Carbon coating<\/li>\r\n \t<li data-section-id=\"1k6thwd\" data-start=\"4219\" data-end=\"4233\">BN coating<\/li>\r\n \t<li data-section-id=\"1euozzt\" data-start=\"4234\" data-end=\"4261\">Composite densification<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"4263\" data-end=\"4266\" \/>\r\n\r\n<h2 data-section-id=\"wrrsz\" data-start=\"4268\" data-end=\"4309\">\ud83d\ude80 Why Choose C Series CVD\/CVI System?<\/h2>\r\n<h3 data-section-id=\"latd11\" data-start=\"4311\" data-end=\"4348\">\ud83d\udc49 Best for Surface Coating (CVD)<\/h3>\r\n<ul data-start=\"4349\" data-end=\"4385\">\r\n \t<li data-section-id=\"14dr660\" data-start=\"4349\" data-end=\"4385\">High purity thin film deposition<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"4387\" data-end=\"4390\" \/>\r\n\r\n<h3 data-section-id=\"zkpq6x\" data-start=\"4392\" data-end=\"4433\">\ud83d\udc49 Best for Composite Materials (CVI)<\/h3>\r\n<ul data-start=\"4434\" data-end=\"4480\">\r\n \t<li data-section-id=\"oblztq\" data-start=\"4434\" data-end=\"4480\">Internal densification of porous materials<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"4482\" data-end=\"4485\" \/>\r\n\r\n<h3 data-section-id=\"d80j70\" data-start=\"4487\" data-end=\"4524\">\ud83d\udc49 Best for High-End Applications<\/h3>\r\n<ul data-start=\"4525\" data-end=\"4579\">\r\n \t<li data-section-id=\"1sz32wz\" data-start=\"4525\" data-end=\"4542\">Semiconductor<\/li>\r\n \t<li data-section-id=\"65yydx\" data-start=\"4543\" data-end=\"4556\">Aerospace<\/li>\r\n \t<li data-section-id=\"1e1ui5q\" data-start=\"4557\" data-end=\"4579\">Advanced materials<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"4581\" data-end=\"4584\" \/>\r\n\r\n<h2 data-section-id=\"1tydzyr\" data-start=\"4586\" data-end=\"4621\">\u2696\ufe0f Position in Product Portfolio<\/h2>\r\n<div class=\"TyagGW_tableContainer\">\r\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\r\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4623\" data-end=\"4842\">\r\n<thead data-start=\"4623\" data-end=\"4644\">\r\n<tr data-start=\"4623\" data-end=\"4644\">\r\n<th class=\"\" data-start=\"4623\" data-end=\"4632\" data-col-size=\"sm\">Series<\/th>\r\n<th class=\"\" data-start=\"4632\" data-end=\"4644\" data-col-size=\"sm\">Function<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody data-start=\"4665\" data-end=\"4842\">\r\n<tr data-start=\"4665\" data-end=\"4701\">\r\n<td data-start=\"4665\" data-end=\"4676\" data-col-size=\"sm\">V Series<\/td>\r\n<td data-start=\"4676\" data-end=\"4701\" data-col-size=\"sm\">Vacuum heat treatment<\/td>\r\n<\/tr>\r\n<tr data-start=\"4702\" data-end=\"4739\">\r\n<td data-start=\"4702\" data-end=\"4713\" data-col-size=\"sm\">P Series<\/td>\r\n<td data-start=\"4713\" data-end=\"4739\" data-col-size=\"sm\">Hot pressing sintering<\/td>\r\n<\/tr>\r\n<tr data-start=\"4740\" data-end=\"4768\">\r\n<td data-start=\"4740\" data-end=\"4751\" data-col-size=\"sm\">S Series<\/td>\r\n<td data-start=\"4751\" data-end=\"4768\" data-col-size=\"sm\">SPS sintering<\/td>\r\n<\/tr>\r\n<tr data-start=\"4769\" data-end=\"4842\">\r\n<td data-start=\"4769\" data-end=\"4799\" data-col-size=\"sm\"><strong data-start=\"4771\" data-end=\"4798\">C Series (This Product)<\/strong><\/td>\r\n<td data-start=\"4799\" data-end=\"4842\" data-col-size=\"sm\"><strong data-start=\"4801\" data-end=\"4840\">CVD \/ CVI deposition &amp; infiltration<\/strong><\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<\/div>\r\n<p data-start=\"4844\" data-end=\"4862\">\ud83d\udc49 Key difference:<\/p>\r\n\r\n<ul data-start=\"4864\" data-end=\"4978\">\r\n \t<li data-section-id=\"lp7q0w\" data-start=\"4864\" data-end=\"4922\">P \/ SPS \u2192 <strong data-start=\"4876\" data-end=\"4920\">Densification via pressure &amp; temperature<\/strong><\/li>\r\n \t<li data-section-id=\"14gd6g\" data-start=\"4923\" data-end=\"4978\">C Series \u2192 <strong data-start=\"4936\" data-end=\"4978\">Material growth via gas-phase reaction<\/strong><\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"4980\" data-end=\"4983\" \/>\r\n\r\n<h2 data-section-id=\"1e4gt4v\" data-start=\"4985\" data-end=\"5012\">\ud83e\udde9 Customization Options<\/h2>\r\n<ul data-start=\"5014\" data-end=\"5138\">\r\n \t<li data-section-id=\"1c7iqbm\" data-start=\"5014\" data-end=\"5044\">Chamber size customization<\/li>\r\n \t<li data-section-id=\"zglimg\" data-start=\"5045\" data-end=\"5073\">Gas system configuration<\/li>\r\n \t<li data-section-id=\"12l6zp0\" data-start=\"5074\" data-end=\"5101\">Process control upgrade<\/li>\r\n \t<li data-section-id=\"h15fzz\" data-start=\"5102\" data-end=\"5138\">Exhaust treatment system upgrade<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"5140\" data-end=\"5143\" \/>\r\n\r\n<h2 data-section-id=\"fzuotw\" data-start=\"5145\" data-end=\"5165\">\ud83c\udfaf Why Choose Us?<\/h2>\r\n<ul data-start=\"5167\" data-end=\"5369\">\r\n \t<li data-section-id=\"uxa53n\" data-start=\"5167\" data-end=\"5211\">Professional CVD\/CVI system manufacturer<\/li>\r\n \t<li data-section-id=\"i1gfn\" data-start=\"5212\" data-end=\"5264\">Strong expertise in advanced material processing<\/li>\r\n \t<li data-section-id=\"2pu14w\" data-start=\"5265\" data-end=\"5326\">Complete solution for coating and composite densification<\/li>\r\n \t<li data-section-id=\"1iuwr96\" data-start=\"5327\" data-end=\"5369\">Reliable technical support and service<\/li>\r\n<\/ul>\r\n\r\n<hr data-start=\"5371\" data-end=\"5374\" \/>\r\n\r\n<h2 data-section-id=\"1udw84c\" data-start=\"5376\" data-end=\"5393\">\ud83d\udce9 Get a Quote<\/h2>\r\n<p data-start=\"5395\" data-end=\"5451\">Looking for a reliable <strong data-start=\"5418\" data-end=\"5450\">CVD\/CVI furnace manufacturer<\/strong>?<\/p>\r\n<p data-start=\"5453\" data-end=\"5513\"><strong data-start=\"5453\" data-end=\"5513\">Contact us today for customized solutions and quotation.<\/strong><\/p>"],"_bw_backup_short_description":[""],"_bw_backup_tags":[""],"_bw_backup_alt_tags":["c series cvd\/cvi system \u2013 advanced chemical vapor deposition & infiltration furnace for composite and semiconductor 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